In this paper, we investigate a novel fast and reliable method to check the bonding quality of silicon wafers. It is based on illuminating the wafers with a high frequency waves (110 - 170 GHz) using quasi-optical technique. The reflected energy is used to evaluate the bonding strength. The reported experimental study is compared with the Infrared images.
Elhawil, A, Stiens, J, De Tandt, C, Ranson, W & Vounckx, R 2010, Characterisation of Silicon Wafer Bonding Quality using Mm-wave Quasi-Optical technique. in Proceedings of Photonics Europe. SPIE, Finds and Results from the Swedish Cyprus Expedition: A Gender Perspective at the Medelhavsmuseet, Stockholm, Sweden, 21/09/09.
Elhawil, A., Stiens, J., De Tandt, C., Ranson, W., & Vounckx, R. (2010). Characterisation of Silicon Wafer Bonding Quality using Mm-wave Quasi-Optical technique. In Proceedings of Photonics Europe SPIE.
@inproceedings{68a21f6419bb46c3b562b168e8cfeea7,
title = "Characterisation of Silicon Wafer Bonding Quality using Mm-wave Quasi-Optical technique",
abstract = "In this paper, we investigate a novel fast and reliable method to check the bonding quality of silicon wafers. It is based on illuminating the wafers with a high frequency waves (110 - 170 GHz) using quasi-optical technique. The reflected energy is used to evaluate the bonding strength. The reported experimental study is compared with the Infrared images.",
keywords = "Quasi-optical, contactless, bonding quality, mm-wave",
author = "Amna Elhawil and Johan Stiens and {De Tandt}, Cathleen and Willy Ranson and Roger Vounckx",
year = "2010",
month = apr,
day = "13",
language = "English",
isbn = "978-0-8194-8184-9",
booktitle = "Proceedings of Photonics Europe",
publisher = "SPIE",
address = "United States",
note = "Finds and Results from the Swedish Cyprus Expedition: A Gender Perspective at the Medelhavsmuseet ; Conference date: 21-09-2009 Through 25-09-2009",
}