Pierre Boulenc, Jo Robbelein, Linkun Wu, Luc Haspeslagh, Piet De Moor, Jonathan Borremans, Maarten Rosmeulen
This paper reports on a Time Delay and Integration image sensor System-on-Chip realized in an embedded CCD process. The integration of single-poly CCD modules into a standard 0.13µm CMOS process is discussed. The technology performance has been evaluated using dedicated test structures. Next, a prototype TDI imager with 5µm pixel pitch, 512 rows and 1024 columns was designed, manufactured and characterized. Charge Transfer Efficiency greater than 0.9999 up till very high line rates of 400kHz was recorded.
Boulenc, P, Robbelein, J, Wu, L, Haspeslagh, L, De Moor, P, Borremans, J & Rosmeulen, M 2016, High speed TDI embedded CCD in CMOS sensor. in International Conference on Space Optics 2016. International Conference on Space Optics 2016, 18/10/16. <http://old.esaconferencebureau.com/custom/icso/2016/fullpaper/FP_IC_152.pdf>
Boulenc, P., Robbelein, J., Wu, L., Haspeslagh, L., De Moor, P., Borremans, J., & Rosmeulen, M. (2016). High speed TDI embedded CCD in CMOS sensor. In International Conference on Space Optics 2016 http://old.esaconferencebureau.com/custom/icso/2016/fullpaper/FP_IC_152.pdf
@inproceedings{d8f3407cf4154e75b02f443cf9e5da4b,
title = "High speed TDI embedded CCD in CMOS sensor",
abstract = "This paper reports on a Time Delay and Integration image sensor System-on-Chip realized in an embedded CCD process. The integration of single-poly CCD modules into a standard 0.13µm CMOS process is discussed. The technology performance has been evaluated using dedicated test structures. Next, a prototype TDI imager with 5µm pixel pitch, 512 rows and 1024 columns was designed, manufactured and characterized. Charge Transfer Efficiency greater than 0.9999 up till very high line rates of 400kHz was recorded. ",
author = "Pierre Boulenc and Jo Robbelein and Linkun Wu and Luc Haspeslagh and {De Moor}, Piet and Jonathan Borremans and Maarten Rosmeulen",
year = "2016",
month = oct,
day = "18",
language = "English",
booktitle = "International Conference on Space Optics 2016",
note = "International Conference on Space Optics 2016, ICSO 2016 ; Conference date: 18-10-2016 Through 21-10-2016",
url = "http://www.icso2016.com/",
}