Radu, I. P., Li, R., Potocnik, A., Ivanov, T., Wan, D., Kubicek, S., Stuyck, N. I. D., Verjauw, J., Jussot, J., Canvel, Y., Godfrin, C., Mongillo, M., Acharya, R., Elsayed, A., Shehata, M., Piao, X., Pacco, A., Souriau, L., Couet, S., ... Govoreanu, B. (2021). Solid state qubits: How learning from CMOS fabrication can speed-up progress in Quantum Computing. In 2021 Symposium on VLSI Circuits, VLSI Circuits 2021 Article 9492397 (Digest of Technical Papers (Symposium on VLSI Circuits); Vol. 2021-June). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/VLSICircuits52068.2021.9492397

@inproceedings{59d6555985f847bf8752574c58dc6fd5,
title = "Solid state qubits: How learning from CMOS fabrication can speed-up progress in Quantum Computing",
abstract = "Building quantum computers requires not only a large number of qubits with high fidelity and low variability, but also a large amount of analog and digital components to drive the qubits. Larger arrays of solid-state qubits with high fidelity and low variability require improvements in fabrication processes and array layout design co-optimized with the underlying hardware technology. Here we outline progress on 300mm fabrication of qubit devices and on classical CMOS components to enable the quantum system. We describe work on superconducting qubits and spin qubits in Si, both types of devices fabricated on 300mm experimental platforms and discuss challenges related to variability. Massive electrical characterization is key over wide temperature range is key to enabling system upscaling for QC.",
keywords = "300mm integration, cryo-CMOS, low temperature characterization, spin qubits, superconducting qubits",
author = "Radu, \{Iuliana P.\} and Roy Li and Anton Potocnik and Tsvetan Ivanov and Danny Wan and Stefan Kubicek and Stuyck, \{N. I. Dumoulin\} and Jeroen Verjauw and J. Jussot and Y. Canvel and C. Godfrin and M. Mongillo and Rohith Acharya and A. Elsayed and M. Shehata and X. Piao and A. Pacco and L. Souriau and Sebastien Couet and Chan, \{Boon Teik\} and Jan Craninckx and Bertrand Parvais and Alexander Grill and S. Narasimhamoorthy and \{Van Winckel\}, Steven and Steven Brebels and Mohiyaddin, \{Fahd A.\} and G. Simion and Bogdan Govoreanu",
year = "2021",
month = jun,
day = "13",
doi = "10.23919/VLSICircuits52068.2021.9492397",
language = "English",
isbn = "9784863487796",
series = "Digest of Technical Papers (Symposium on VLSI Circuits)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2021 Symposium on VLSI Circuits, VLSI Circuits 2021",
address = "United States",
note = "35th Symposium on VLSI Circuits, VLSI Circuits 2021 ; Conference date: 13-06-2021 Through 19-06-2021",
}