A method for determining characteristics of a layer-based structure is disclosed. The method comprises repetitively irradiating the layer-based structure with a transient continuous wave electromagnetic radiation and capturing as a function of time a transient part of the reflection or transmission of the transient continuous wave electromagnetic radiation reflected at or transmitted through the different interfaces of layer-based structure. The method furthermore comprises deriving from the transient part of the reflected or transmitted transient continuous wave electromagnetic radiation as function of time information regarding different contributions in the transient part of the reflected or transmitted transient continuous wave electromagnetic radiation stemming from the reflections at different interfaces of the layer-based structure and determining from said information at least geometric information and/or electromagnetic properties of the different layers of the layer based structure. A corresponding system also is claimed.
Stiens, J & Pourkazemi, A Apr. 25 2018, Characterization of multilayer structures, Patent No. EP3311147.
Stiens, J., & Pourkazemi, A. (2018). Characterization of multilayer structures. (Patent No. EP3311147).
@misc{07f90d16adf14ffc9752303469e513f1,
title = "Characterization of multilayer structures",
abstract = "A method for determining characteristics of a layer-based structure is disclosed. The method comprises repetitively irradiating the layer-based structure with a transient continuous wave electromagnetic radiation and capturing as a function of time a transient part of the reflection or transmission of the transient continuous wave electromagnetic radiation reflected at or transmitted through the different interfaces of layer-based structure. The method furthermore comprises deriving from the transient part of the reflected or transmitted transient continuous wave electromagnetic radiation as function of time information regarding different contributions in the transient part of the reflected or transmitted transient continuous wave electromagnetic radiation stemming from the reflections at different interfaces of the layer-based structure and determining from said information at least geometric information and/or electromagnetic properties of the different layers of the layer based structure. A corresponding system also is claimed.",
author = "Johan Stiens and Ali Pourkazemi",
year = "2018",
month = apr,
day = "25",
language = "English",
type = "Patent",
note = "EP3311147",
}