Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications

Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications ■

Vladimir Matvejev, Cathleen De Tandt, Willy Ranson, Johan Stiens

Abstract ■

Wet Si bulk micromachining enables producing hexagonally shaped waveguides (WH) with superior performance and are applicable to low THz frequency range. We discuss the fabrication process, hexagonal cross-section analysis, and balance between loss mitigation and operational frequency band of WH.