A 400uW, 4.7-6.4GHz VCO under an Above-IC inductor in 45nm CMOS
 
A 400uW, 4.7-6.4GHz VCO under an Above-IC inductor in 45nm CMOS 
 
Jonathan Borremans, Piet Wambacq, Maarten Kuijk, Geert Carchon, S. Decoutere
 
Abstract 

With the increasing cost of scaled CMOS, effort is spent in maximizing performance attainable in already available technologies. Above-IC technology (A-IC), consisting of a 5 ? m thick electroplated Cu layer on an 18 micron low-K BCB dielectric, post-processed on top of the CMOS, provides a low-cost solution to achieve high-Q passive devices, with relaxed mask requirements. A technique is presented to fully layout a VCO under its A-IC inductor, by using a two-layer shield in the top layers of the CMOS back-end, enabling 3D integration of active circuitry and high-Q passives. The technique is demonstrated on an LC-VCO in 45nm bulk CMOS, that consumes only 400 ? W, and occupies a low area of 0.12mm2.