A resonant III-V semiconductor layer and a grating coupler integrated in a waveguide modulator for far-infrared light

A resonant III-V semiconductor layer and a grating coupler integrated in a waveguide modulator for far-infrared light ■

Johan Stiens, Cathleen De Tandt, Willy Ranson, Roger Vounckx, Irina Veretennicoff, Gustaaf Borghs, Piet De Meester