Ar Implantation, a Passivation Technique for High-Resistivity Silicon within the MCM-D Technology
 
Ar Implantation, a Passivation Technique for High-Resistivity Silicon within the MCM-D Technology ■
 
Guillermo Posada Quijana, Geert Carchon, Philippe Sousson, Gert Poesen, B. Nauwelaers, Walter De Raedt