Ar Implantation, a Passivation Technique for High-Resistivity Silicon within the MCM-D Technology
 
Ar Implantation, a Passivation Technique for High-Resistivity Silicon within the MCM-D Technology ■
 
Guillermo Posada Quijana, Guillermo Posada Quijana, Guillermo Posada Quijana, Geert Carchon, Geert Carchon, Geert Carchon, Philippe Sousson, Philippe Sousson, Philippe Sousson, Gert Poesen, Gert Poesen, Gert Poesen, B. Nauwelaers, B. Nauwelaers, B. Nauwelaers, Walter De Raedt, Walter De Raedt, Walter De Raedt