Experimental Characterisation of Reactive Ion Etched Germanium Diffraction Gratings at 10.6 µm Wavelength
 
Experimental Characterisation of Reactive Ion Etched Germanium Diffraction Gratings at 10.6 µm Wavelength 
 
Johan Stiens, Willy Ranson, , Cathleen De Tandt, Roger Vounckx, Vladimir Kotov, Gennady Shkerdin, Bart Dhoedt, Roel Baets