On-wafer human metal model measurements for system-level ESD analysis

On-wafer human metal model measurements for system-level ESD analysis ■

M. Scholz, M. Scholz, Dimitri Linten, Dimitri Linten, S. Thijs, S. Thijs, M. Sawada, M. Sawada, T. Kakaei, T. Kakaei, T. Hasebe, T. Hasebe, D. Lafonteese, D. Lafonteese, V. Vashchenko, V. Vashchenko, Gerd Vandersteen, Gerd Vandersteen, P. Hopper, P. Hopper, G. Groeseneken, G. Groeseneken

Abstract ■

An on-wafer human metal model ESD measurement setup with voltage and current waveform measurement capability is presented. Using this setup, typical ESD protection structures and ESD protected circuits are characterized. A correlation between device responses on system-level ESD compared to component-level ESD stress like human body model is found to depend strongly on the device type.