On-wafer human metal model measurements for system-level ESD analysis

On-wafer human metal model measurements for system-level ESD analysis ■

M. Scholz, Dimitri Linten, S. Thijs, M. Sawada, T. Kakaei, T. Hasebe, D. Lafonteese, V. Vashchenko, Gerd Vandersteen, P. Hopper, G. Groeseneken

Abstract ■

An on-wafer human metal model ESD measurement setup with voltage and current waveform measurement capability is presented. Using this setup, typical ESD protection structures and ESD protected circuits are characterized. A correlation between device responses on system-level ESD compared to component-level ESD stress like human body model is found to depend strongly on the device type.