Large-Signal Characterisation and Analysis of AlN/GaN MISHEMTs on Si with a PAE > 62% at 28 GHz
 
Large-Signal Characterisation and Analysis of AlN/GaN MISHEMTs on Si with a PAE > 62% at 28 GHz ■
 
Rana Yasser ElKashlan, Rana Yasser ElKashlan, Rana Yasser ElKashlan, Sachin Yadav, Sachin Yadav, Sachin Yadav, Ahmad Khaled, Ahmad Khaled, Ahmad Khaled, Dongping Xiao, Dongping Xiao, Dongping Xiao, Babak Kazemi, Babak Kazemi, Babak Kazemi, Hao Yu, Hao Yu, Hao Yu, Ali Reza Alian, Ali Reza Alian, Ali Reza Alian, Uthayasankaran Peralagu, Uthayasankaran Peralagu, Uthayasankaran Peralagu, Nadine Collaert, Nadine Collaert, Nadine Collaert, Bertrand Parvais, Bertrand Parvais, Bertrand Parvais
 
Abstract ■

We investigate AlN/GaN MISHEMTs fabricated on a 200 mm Si substrate with an in-situ SiN as the gate insulator and access region passivation layer. The impact of SiN thickness scaling on the large-signal performance is analysed using pulsed IV characterisation combined with first-order load-line-based formulae to quantify the degradation in Pout and PAE stemming from increased trapping-induced current collapse associated with thinned-down SiN thicknesses. At 28 GHz, large-signal characterisation, including tuning up to the third harmonic, reveals a competitive linear gain of 15 dB and PAE of 62.5\% at 6 V, making these devices suitable for user equipment intended for FR2/FR3 operation.