Surface State Spectrum of AlGaN/AlN/GaN Extracted From Static Equilibrium Electrostatics
 
Surface State Spectrum of AlGaN/AlN/GaN Extracted From Static Equilibrium Electrostatics ■
 
Hao Yu, Hao Yu, Hao Yu, Alireza Alian, Alireza Alian, Alireza Alian, Uthayasankaran Peralagu, Uthayasankaran Peralagu, Uthayasankaran Peralagu, Ming Zhao, Ming Zhao, Ming Zhao, Niamh Waldron, Niamh Waldron, Niamh Waldron, Bertrand Parvais, Bertrand Parvais, Bertrand Parvais, Nadine Collaert, Nadine Collaert, Nadine Collaert
 
Abstract ■

We extract an AlGaN surface state spectrum with a density ( \$\{D\}\_\{\textbackslash{}text\{SS\}\}\$ ) ranging between \$1.4\textbackslash{}times10\$ 12 and \$4.7\textbackslash{}times10\$ 12 eV-1cm-2. The low \$\{D\}\_\{\textbackslash{}text\{SS\}\}\$ is achieved with in situ SiN passivation. \$\{D\}\_\{\textbackslash{}text\{SS\}\}\$ is extracted from ungated AlGaN/AlN/GaN heterostructures with varied AlN thicknesses between 0 and 2 nm: increased AlN thicknesses in heterostructures monotonously increase two-dimensional electron gas (2DEG) densities \$\{N\}\_\{\textbackslash{}text\{sh\}\}\$ and AlGaN surface potential energies \$\{q\} \{\textbackslash{}varphi \} \_\{\textbackslash{}text\{s\}\}\$ , and \$\{D\}\_\{\textbackslash{}text\{SS\}\}\$ is extracted with \$\textbackslash{}boldsymbol \{\textbackslash{}Delta \} \{N\}\_\{\textbackslash{}text\{sh\}\}\$ - \$\textbackslash{}boldsymbol \{\textbackslash{}Delta \} \{\textbackslash{}varphi \}\_\{\textbackslash{}text\{s\}\}\$ correlations. The \$\{D\}\_\{\textbackslash{}text\{SS\}\}\$ extraction methodology in this work features calibrated polarization charge values, Hartree approximation-based 2DEG profile calculation, and incorporated C-doped GaN (C-GaN) substrate impact on 2DEG. We also extract the charge neutrality level at the AlGaN surface, which is 0.95 eV below conduction band minimum.