Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications
 
Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications ■
 
Vladimir Matvejev, Vladimir Matvejev, Vladimir Matvejev, Cathleen De Tandt, Cathleen De Tandt, Cathleen De Tandt, Willy Ranson, Willy Ranson, Willy Ranson, Johan Stiens, Johan Stiens, Johan Stiens
 
Abstract ■

Wet Si bulk micromachining enables producing hexagonally shaped waveguides (WH) with superior performance and are applicable to low THz frequency range. We discuss the fabrication process, hexagonal cross-section analysis, and balance between loss mitigation and operational frequency band of WH.