A 1 * 64 complementary metal oxide semiconductor ranging sensor based on current-assisted photonic demodulators
 
A 1 * 64 complementary metal oxide semiconductor ranging sensor based on current-assisted photonic demodulators ■
 
Ward van der Tempel, Ward van der Tempel, Ward van der Tempel, Daniël Van Nieuwenhove, Daniël Van Nieuwenhove, Daniël Van Nieuwenhove, Riemer Grootjans, Riemer Grootjans, Riemer Grootjans, Maarten Kuijk, Maarten Kuijk, Maarten Kuijk
 
Abstract ■

A new complementary metal oxide semiconductor (CMOS) active pixel-ranging sensor is presented, realised as a 1 * 64 array of 30 microns * 30 microns lock-in pixels. The sensor is based on the Current-Assisted Photonic Demodulator (CAPD), implemented in a Standard CMOS 0.35 ? m technology. The ranging pixel achieves 75\% Fill-Factor, 0.22 A W-1 total QE and a demodulation bandwidth up to 70 MHz, both at 860 nm light. Range-finding is achieved through Modulated Wave Time-Of-Flight (TOF) measurements with a modulation frequency of 20 MHz. Distance measurements are presented. This sensor represents the first step towards integrating CAPD-based lock-in pixels in large TOF CMOS ranging systems