A 1k-pixel 3D CMOS sensor
 
A 1k-pixel 3D CMOS sensor ■
 
Ward van der Tempel, Ward van der Tempel, Ward van der Tempel, Riemer Grootjans, Riemer Grootjans, Riemer Grootjans, Daniël Van Nieuwenhove, Daniël Van Nieuwenhove, Daniël Van Nieuwenhove, Maarten Kuijk, Maarten Kuijk, Maarten Kuijk
 
Abstract ■

A solid-state three-dimensional Time-of-Flight sensor is presented consisting of 32 * 32 range pixels based on Current-Assisted Photonic Demodulation (CAPD). Each pixel measures 30 micometer * 30 micometer and consists of 6 transistors and a differential current-assisted photonic demodulator, yielding a Fill-Factor of 66\%. The sensor is implemented in 0.35 m standard CMOS technology without optical optimization steps, while still achieving a 0.2 A/W responisivity at 870 nm. Range-finding is achieved through Modulated Wave Time-of-Flight using a modulation frequency of 20 MHz. The range performance of this sensor is discussed and TOF measurements of a prototype camera-system using this sensor are presented