Continuous Time-of-Flight Ranging Using a MEMS Diffractive Subwavelength Period Grating (de)Modulator
 
Continuous Time-of-Flight Ranging Using a MEMS Diffractive Subwavelength Period Grating (de)Modulator ■
 
Joris Roels, Joris Roels, Joris Roels, Ward van der Tempel, Ward van der Tempel, Ward van der Tempel, Daniël Van Nieuwenhove, Daniël Van Nieuwenhove, Daniël Van Nieuwenhove, Riemer Grootjans, Riemer Grootjans, Riemer Grootjans, Maarten Kuijk, Maarten Kuijk, Maarten Kuijk, D. Van Thourhout, D. Van Thourhout, D. Van Thourhout, Roel Baets, Roel Baets, Roel Baets
 
Abstract ■

We present a time-of-flight (TOF) ranging experiment based on optical mixing. The key component in this experiment is the optical (de)modulator. Consequently we also report on the design, fabrication, and characterization of a microelectromechanical system diffractive grating (de)modulator with a subwavelength period. The obtained results are an important step toward an optical mixing based TOF 3-D imaging system, which we will further develop in our future work