A 1 x 64 CMOS Ranging Sensor based on Current Assisted Photonic Demodulators

A 1 x 64 CMOS Ranging Sensor based on Current Assisted Photonic Demodulators ■

Ward van der Tempel, Ward van der Tempel, Ward van der Tempel, Daniël Van Nieuwenhove, Daniël Van Nieuwenhove, Daniël Van Nieuwenhove, Riemer Grootjans, Riemer Grootjans, Riemer Grootjans, Maarten Kuijk, Maarten Kuijk, Maarten Kuijk

Abstract ■

A new CMOS active pixel ranging sensor is presented, realized as a 1x64 array of 30\$\textbackslash{}mu\$m x 30\$\textbackslash{}mu\$m lock-in pixels. The sensor is based on the current-assisted photonic demodulator, implemented in Standard CMOS 0.35 \$\textbackslash{}mu\$m technology. The ranging pixel achieves 75\textbackslash{}\% Fill-Factor, 0.22 A/W total Q.E. and a demodulation bandwidth up to 70 MHz, both at 860nm light. Range-finding is achieved through Modulated Wave Time-of-Flight measurements with a modulation frequency of 20MHz. Distance measurements are presented. This sensor represents the first step towards integrating CAPD-based lock-in pixels in large TOF CMOS ranging systems.