High-efficiency AlGaInP thin-film LEDs using surface texturing and waferbonding with conductive epoxy
 
High-efficiency AlGaInP thin-film LEDs using surface texturing and waferbonding with conductive epoxy 
 
Cathleen Rooman, Cathleen Rooman, Maarten Kuijk, Maarten Kuijk, Stijn De Jonge, Stijn De Jonge, C. Karnutsch, C. Karnutsch, R. Butendeich, R. Butendeich, K. Streubel, K. Streubel, P. Heremans, P. Heremans
 
Abstract 

In thin-film light-emitting diodes (LEDs) absorption of the generated light in the substrate is avoided by the transfer of the epitaxial LED layers on a reflecting carrier. The extraction efficiency can be further enhanced by texturing the top surface. We developed a structure for high-efficiency surface-textured thin-film AlGaInP LEDs with improved heat dissipation by wafer-bonding onto a carrier substrate using conductive epoxy. The improved heat removal toward the substrate through the conductive epoxy increases the maximum allowable current density by more than a factor of two, compared to LEDs bonded on the carrier substrate with benzocyclobutene. As a result, an optical power of 65 mW is achieved for unencapsulated devices emitting at 650 nm. Using this technology, we also demonstrate an external quantum efficiency of 43\% for unencapsulated LEDs at a peak wavelength of 650 nm, which is the highest reported efficiency for AlGaInP thin-film LEDs. The external quantum efficiency increases to 52\% at 100 K