Trapping in an impurity (e.g. Fe, C) doped back barrier (BB) causes pronounced on-resistance (Ron) dispersion of GaN HEMTs. We demonstrate that the BB trapping is alleviated by increasing 2DEG density Nsh in the GaN channel (50% increased Nsh results in 30% less Delta mathrm{R} -{on}) and inserting an additional intrinsic AlGaN BB (100 nm AlGaN with 50% less Delta mathrm{R} -{on}). We propose a novel flat-AlGaN-BB-energy-band designing criterion for the AlGaN/C-GaN BB combination.
Yu, H, Parvais, B, Peralagu, U, Elkashlan, RY, Rodriguez, R, Khaled, A, Yadav, S, Alian, A, Zhao, M, De Almeida Braga, N, Cobb, J, Fang, J, Cardinael, P, Sibaja-Hernandez, A & Collaert, N 2022, Back Barrier Trapping Induced Resistance Dispersion in GaN HEMT: Mechanism, Modeling, and Solutions. in 2022 International Electron Devices Meeting, IEDM 2022. 2022 INTERNATIONAL ELECTRON DEVICES MEETING, IEDM, Institute of Electrical and Electronics Engineers Inc., pp. 3061-3064, 2022 International Electron Devices Meeting, IEDM 2022, San Francisco, United States, 3/12/22. https://doi.org/10.1109/IEDM45625.2022.10019489
Yu, H., Parvais, B., Peralagu, U., Elkashlan, R. Y., Rodriguez, R., Khaled, A., Yadav, S., Alian, A., Zhao, M., De Almeida Braga, N., Cobb, J., Fang, J., Cardinael, P., Sibaja-Hernandez, A., & Collaert, N. (2022). Back Barrier Trapping Induced Resistance Dispersion in GaN HEMT: Mechanism, Modeling, and Solutions. In 2022 International Electron Devices Meeting, IEDM 2022 (pp. 3061-3064). (2022 INTERNATIONAL ELECTRON DEVICES MEETING, IEDM). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IEDM45625.2022.10019489
@inproceedings{548b9342dabc4d35a3ebc39bc18ab3f4,
title = "Back Barrier Trapping Induced Resistance Dispersion in GaN HEMT: Mechanism, Modeling, and Solutions",
abstract = "Trapping in an impurity (e.g. Fe, C) doped back barrier (BB) causes pronounced on-resistance (Ron) dispersion of GaN HEMTs. We demonstrate that the BB trapping is alleviated by increasing 2DEG density Nsh in the GaN channel (50% increased Nsh results in 30% less Delta mathrm{R} -{on}) and inserting an additional intrinsic AlGaN BB (100 nm AlGaN with 50% less Delta mathrm{R} -{on}). We propose a novel flat-AlGaN-BB-energy-band designing criterion for the AlGaN/C-GaN BB combination. ",
author = "Hao Yu and B. Parvais and U. Peralagu and Elkashlan, {R. Y.} and R. Rodriguez and A. Khaled and S. Yadav and A. Alian and M. Zhao and {De Almeida Braga}, N. and J. Cobb and J. Fang and P. Cardinael and A. Sibaja-Hernandez and Nadine Collaert",
note = "Publisher Copyright: {\textcopyright} 2022 IEEE. Copyright: Copyright 2023 Elsevier B.V., All rights reserved.; 2022 International Electron Devices Meeting, IEDM 2022 ; Conference date: 03-12-2022 Through 07-12-2022",
year = "2022",
doi = "10.1109/IEDM45625.2022.10019489",
language = "English",
series = "2022 INTERNATIONAL ELECTRON DEVICES MEETING, IEDM",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "3061--3064",
booktitle = "2022 International Electron Devices Meeting, IEDM 2022",
address = "United States",
}