Wet Si bulk micromachining enables producing hexagonally shaped waveguides (WH) with superior performance and are applicable to low THz frequency range. We discuss the fabrication process, hexagonal cross-section analysis, and balance between loss mitigation and operational frequency band of WH.
Matvejev, V, De Tandt, C, Ranson, W & Stiens, J 2010, Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications. in 35. International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz 2010), Unknown, 1/01/10.
Matvejev, V., De Tandt, C., Ranson, W., & Stiens, J. (2010). Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications. In 35 (International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz 2010)).
@inproceedings{f91fd76bdf184ffdab951078b77dd889,
title = "Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications",
abstract = "Wet Si bulk micromachining enables producing hexagonally shaped waveguides (WH) with superior performance and are applicable to low THz frequency range. We discuss the fabrication process, hexagonal cross-section analysis, and balance between loss mitigation and operational frequency band of WH.",
keywords = "Practical, Experimental/ micromachining;, Microwave measurement techniques, Microwave circuits and devices, Waveguides and microwave transmission lines/ Si/in",
author = "Vladimir Matvejev and \{De Tandt\}, Cathleen and Willy Ranson and Johan Stiens",
year = "2010",
language = "English",
isbn = "978-1-4244-6655-9",
series = "International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz 2010)",
booktitle = "35",
note = "Unknown ; Conference date: 01-01-2010",
}